JPH035803Y2 - - Google Patents

Info

Publication number
JPH035803Y2
JPH035803Y2 JP1984088369U JP8836984U JPH035803Y2 JP H035803 Y2 JPH035803 Y2 JP H035803Y2 JP 1984088369 U JP1984088369 U JP 1984088369U JP 8836984 U JP8836984 U JP 8836984U JP H035803 Y2 JPH035803 Y2 JP H035803Y2
Authority
JP
Japan
Prior art keywords
air
clean room
filter
air outlet
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984088369U
Other languages
English (en)
Japanese (ja)
Other versions
JPS613345U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8836984U priority Critical patent/JPS613345U/ja
Publication of JPS613345U publication Critical patent/JPS613345U/ja
Application granted granted Critical
Publication of JPH035803Y2 publication Critical patent/JPH035803Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP8836984U 1984-06-14 1984-06-14 空気清浄装置 Granted JPS613345U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8836984U JPS613345U (ja) 1984-06-14 1984-06-14 空気清浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8836984U JPS613345U (ja) 1984-06-14 1984-06-14 空気清浄装置

Publications (2)

Publication Number Publication Date
JPS613345U JPS613345U (ja) 1986-01-10
JPH035803Y2 true JPH035803Y2 (en]) 1991-02-14

Family

ID=30641436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8836984U Granted JPS613345U (ja) 1984-06-14 1984-06-14 空気清浄装置

Country Status (1)

Country Link
JP (1) JPS613345U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07225Y2 (ja) * 1988-07-18 1995-01-11 ローム株式会社 クリーンユニット
JP2014217783A (ja) * 2014-08-13 2014-11-20 高園テクノロジー株式会社 水剤供給装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7215945A (en]) * 1972-11-24 1974-05-28

Also Published As

Publication number Publication date
JPS613345U (ja) 1986-01-10

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